Education Ph.D. Materials Science, Colorado School of Mines, 1990

M.S. Metallurgy, University of Utah, 1987

B.S. Materials Science & Engineering, University of Utah, 1986

Minors: Chemistry, Physics, Chinese Language (Mandarin).

Academia Research Associate Professor, University of Utah, SLC, Department of Mech. Engineering,

Adjunct Associate Professor, Department of Electrical & Computer Engineering

Associate Director, Utah Nanofab (Cleanroom, Surface Analysis & nano-Scale Imaging)

Research • Keck Education Grant for developing modules to teach intuitive scaling engineering using MEMS

• Chip Scale Package (CSP) design & reliability by classical thermal and unique tri-axial bending

• Biomimetic MEMS lens / iris for microcamera applications (UURF/TCP)

• Center for Interdisciplinary Arts and Technology: the Utah MEMnagerie––Kinetic Micro Sculpture^TM

• Charge-pumped MEMS actuation http://www.nanofab.utah.edu/index/about-us/cool-stuff

Industry Bourns, Inc. Logan, UT; Ogden, UT; Cork, IR

Principal Engineer, CSP Process Development,

Program Manager, Microelectronics Division

VLSI Technology, Inc., San Jose, CA

Staff Development Engineer, Technology Development Division

Analytical / Materials Engineering Supervisor/Manager

Staff R&QA Engineer

IBM Corporation, Boulder, CO (now LEXMARK Int'l, Inc.)

Graduate Research Intern

Teaching & etc. Fall ’09 Volunteer Instructor, Salt Lake Institute of Religion (UofU), Rel 430 Doctrines of the Gospel

2006-12 Volunteer coach, Science Olympiad; 2012 State Director, Utah Science Olympiad

1981-83 Volunteer LDS missionary serving in Taipei, Taiwan

2002-09 Developed course in Microsystems Design and Characterization, cross-listed in ME, ECE, MetE, BioE, ChE, MSE (Design for reliability and practical techniques for physical characterization)

Co-developed grad (IGERT) courses in Creativity, Teamwork, Communication, Leadership & Ethics (two years)

Co-developed course in Practical Scanning Electron Microscopy

Co-developed freshman course in Foundations of Microsystems

2007-2013 Co-developed course Heterogeneous Microsystems Technology; Sandia MEMS projects

Invited “USTAR / U of U / COE Partnerships to Spur R&D in micro/nano Materials & Systems”, USTAR Confluence: Where Research Meets

Lectures Commercialization, SLC UT, 3-4 Nov, 2014

“Utah's Nanofab:  The Machine Shop of the Future”, Keynote lecture for Northrop-Grumman Engineering Week, SLC, 22 Feb, 2013

“Teaching Scaling Engineering using MEMS”, Utah Science Teacher’s Association, 8 Feb, 2013, Provo

“Running Science Olympiad in your school––and staying sane”, Utah Science Teacher’s Association, 8 Feb, 2013, Provo

“University of Utah MRSEC Shared Facilities: an overview of the Utah Nanofab”, Presentation to the MRSEC Shared Facilities Workshop, Northwestern University, Chicago, November 1-2, 2011

“MEMS Actuation: Kinetic Micro Sculpture" Presented to the BYU Graduate Seminar, Department of Mechanical Engineering,

Provo, 11/03/08

“Broadly building Utah's technology workforce training pipeline”, White Paper prepared by an ad-hoc committee (T. Kar, J.

Andrade, J. Gardner, T. Goetz, G. Hansen, V. Itamura, C. Sanders) for nanoUtah 2008, Presented by IR Harvey 10/16/08

“Charge-Pumped MEMS Actuation”, Invited lecture to Sandia National Labs University Alliance, Albuquerque, NM, 4/1/08

“Microsystems: A career and a vehicle promoting engineering” Graduate Seminar, University of Utah,

Department of Metallurgical Engineering, Jan 23, 2008

“Correlation of CSP Bending Fatigue in a Cell Phone to a Unique Predictive Cyclic Bending Test”,

Graduate Seminar, University of Utah, Department of Metallurgical Engineering, 30 October, 2002

“Board Design, Construction, and Assembly Considerations for the Transition to Chip Size Packaging”,

HDI workshop, Phoenix, AZ, 23 Aug., 1999

"New Paradigms and Conclusion Metrics in Value-Added Failure Analysis", Front

Range Failure Analysis InfoExchange, Louisville, Colorado, Sept. 30, 1994

"Micromachining and Microsurgery: Future Directions at VLSI". Invited workshop presentation for ASM/ISTFA '93, Los Angeles.

"Micromachining and Microsurgery Using a Seiko SMI-8100 Focused Ion Beam Milling Machine" ASM/ISTFA '92, Los Angeles.

Hobby Activity Well, Dr. Nibley, I do have a suggestion: Always believe God; Always disbelieve Satan; Sunstone, 183, Winter 2016, pp 11-15

Satan Gets to Reign BAD THINGS HAPPEN God Gets the Blame; Outskirts Press, 2017, ISBN 978-1-4787-9022-8

The Lineage of the Lie – Revealing Paul’s Man of Sin; Outskirts Press, 2018, ISBN 978-1-4787-8642-9

Blurring the Lines: Inclusiveness Between Mainstream Christians and Mormons; Sunstone Summer Symposium (session 166), July 27, 2017, University of Utah, Salt Lake City

The Moral Agency Blueprint vs. the Doctrine of Privation; Sunstone Summer Symposium (session 214), July 28, 2017, University of Utah, Salt Lake City

Invited Papers I.R. Harvey, A. L. Hogan, K. R. Ford, R. Boutte and B. Baker, “Charge Pumped MEMS Actuation for High Force and Large Displacement” (ISSN: 2306-8515, e-ISSN 1726-5479) Sensors & Transducers, Vol.183, Issue 12, Dec. 2014, p. 60

I.R. Harvey, J. Ortowski, D. Turner, C. Herbert, “Empirical Strategy for Characterizing and Minimizing Effects of Flexure-Induced Tensile Stress in CSP's”, Int’l J. Mic. Elec. Pack. issue IV, vol. 23, No. 4, 2000

Best US Tech M.R. Larsen, I.R. Harvey, D. Turner, B. Porter, J. Ortowski, “Mechanical Bending Technique For Determining CSP Design and

Paper Runner-up Assembly Weaknesses”, Proceedings APEX 2004, Anaheim, CA

Presentations I. R. Harvey, F. Solzbacher, B. Gale, T. Parks, R. Brown, USTAR / U of U / COE Partnerships to Spur R&D in micro/nano Materials & Systems, COMS / NanoUtah SLC 15 October, 2014

B. Baker, I.R. Harvey, B. Gale, J. Thomas, B. Tran, Product Innovation on the Microscale: Using Tiny Devices to Teach Creative Solutions to Big Problems COMS / NanoUtah SLC 14 October, 2014

T. Dallas, M. Pleil, B. Baker, H. Stalford, M. De Boer, I.R. Harvey, The MEMS University Alliance: Education and Research Collaboration in Microsystems, COMS / NanoUtah SLC 15 October, 2014

I. R. Harvey, A. L. Hogan, K. R. Ford and B. Baker, Charge Pumping for High-force, large-displacement MEMS and a vision for charge scavenging and storage infrastructure, Micro/Nano TechConnect World, June 15-19, 2014, Washington DC

A. Hogan, B. Baker, C. Fisher, S. Naylor, D Fettig, I.R. Harvey, Biomimetic Accommodating Lens with Implementation in MEMS

MOEMS/MEMS SPIE Photonics West, San Francisco, CA, 21-26 January, 2012

A. L. Hogan, K. R. Ford and I. R. Harvey, "Out-Of-Plane MEMS Actuation Using a Scanning Electron Microscope," in ASME 2012 International Mechanical Engineering Congress & Exposition, Houston, Texas.

A. L. Hogan, M. Frerck, J. Passman, M. P. Benardi, M. Short, J. Campbell and I. R. Harvey, "Audiovisual Enhancement through MEMS Micro Camcorder," Sandia University Alliance Design Competition, Albuquerque, NM , 2012.

Brian Baker, Austin Welborn, Ian Harvey, MEMS MicroBarbershop white paper; Sandia National Laboratories University Alliance Design Competition MEMS Educational Design Category winner, April 5 2010, Sandia Labs, Albuquerque, NM,

IR Harvey and Brian Baker, “MEMS and SEM: Outreach tools for the nanotech era”, COMS 2010, Albuquerque, September 2010

Kathryn Ecsedy and Ian Harvey, An Exploration of the Artistic Applications of MEMS: Gallery on a Chip, presented at The 6th International Conference on Technology, Knowledge and Society, Berlin, 15 January, 2010.

A. L. Hogan, A. Paulsen, B. Baker and H. I. R., "Quantifying micro Charge Pump Actuation and off-chip manipulation using SUMMiT V^TM," Sandia University Alliance Design Competition, Albuquerque, NM, 2009.

IR Harvey, P. Stout, A. Hogan, K. Ecsedy, K. Ford, A. Paulsen, “Utah Memnagerie: Kinetic Micro Sculpture” When Art Meets

Science: Research Presentations and Performances by the 2009 CIDAT Fellowship Recipients, 5/1/09 New Media Wing, U of Utah

A. L. Hogan, C. Allan, S. Horschel, G. Liddiard, D. Erickson, F. Mohammed, T. Meacham, B. Baker and I. R. Harvey, "University of Utah Force and Vacuum Contactless Switch Characterization chip using SUMMiT-V^TM" Sandia University Alliance Design Competition, Albuquerque, NM, 2008.

A. L. Hogan, S. Brumbaugh, E. Anderson, G. Anderson, C. Allan, S. Horschel, G. Liddiard, T. Anderson, T. Meacham, B. Baker and I. R. Harvey, "The Utah MEMnagerie^TM demonstrating Kinetic uSculpture and practical MEMS actuation using SUMMiT V^TM" Sandia University Alliance Design Competition, Albuquerque, NM, 2008.

Larsen, M. R., Harvey, I. R., Curtis, A., Tessier, T., “Bend Testing Direct Attach Bump Architectures with Stress Mode Correlated to Field-Wearout in Handheld Application,” IMAPS 2008 - 41st International Symposium on Microelectronics, Providence, RI, pp. 190 to 197, Nov. 2008.

S. Leelavanichkul, J. Mehta, R. Boutte, I. Harvey, and F. Solzbacher; “Design of a Micro-Integrated Optical MEMS for Camera Applications”, Opto 98, Nurnberg, Germany, May 4, 2008

I.R. Harvey, K.S. Udell, P. Tikalsky, N. Cotter, G. Silcox, D. Leonard, “Recruiting Science Olympiad: Low-hanging (pre-engineering) fruit”, April 28, ‘07 Rocky Mountain Chapter, American Society for Engineering Education, Provo UT

Ian Harvey, T. Kar, J. Andrade, J. Gardner, T. Goetz, G. Hansen, A. Herd, V. Itamura, M. Robinson, C. Sanders, Preparing for Nanotech Manufacturing: Broadly building Utah's technology workforce training pipeline, 28 November 2007, a White Paper proposal to the State of Utah, prepared by an ad-hoc nanoUtah 2007 committee invested in Utah's people and nanotechnology

Ian R. Harvey, Kent S. Udell, Planning for Utah Economic Competitiveness: “Top-10 in the Nation in Science / Engineering Education”, White Paper presented to USTAR Executive Director, 22 June, 2007

I.R. Harvey A SUMMiT^TM-based MEMS design for in-SEM actuation: a qualitative proof-of-concept for dynamic MEMS outreach demonstrations White paper supporting the University of Utah submission to the 2007 Sandia University Alliance Design Competition

I.R. Harvey, M.R. Larsen, D.Turner, I. Doyle, J. Somers, J.Ortowski, “Evaluation of Solder-to-Chip Attachment, Wafer-Level Bumping Architectures: II. Performance in BHT, Cyclic Mechanical Bending and Temperature Cycling”, presented in the 2005 TMS Annual Meeting & Exhibition, San Francisco, February 13-17, 2005

Publications A. Mondal, B. Baker, I. R. Harvey and A. P. Moreno, "PerFlexMEA: a thin microporous microelectrode array for in vitro cardiac electrophysiological studies on hetero-cellular bilayers with controlled gap junction communication", Lab on a Chip, 2015, Advance Article, DOI: 10.1039/C4LC01212G

A.L. Hogan, K.R. Ford, and I.R. Harvey, Out-Of-Plane MEMS Actuation Using A Scanning Electron Microscope, Proceedings of the ASME 2012 International Mechanical Engineering Congress & Exposition IMECE2012 November 9-15, 2012, Houston, Texas, USA IMECE2012-88128

Kathryn Ecsedy, Ian Harvey, Alex Hogan, Kurtis Ford, Brian Baker, Paul Stout, Solomon Brumbaugh, Jacob Piatt, “An Exploration of the Artistic Applications of MEMS: Gallery on a Chip “The International Journal of Technology, Knowledge and Society, Volume 6, Number 1, 2010, http://www.Technology-Journal.com, ISSN 1832-3669

Mark A. Eddings, James Stephenson, and Ian Harvey, A Hands-On Interactive Freshman Level Survey Course Designed to Steer Undergraduates into Microsystems Coursework and Research, IEEE Transactions on Education, vol 52 #3, Aug 2009, 312-317

A. Hogan, E. Anderson and I.R. Harvey, Investigation of Charge Pumped MEMS Actuation, The U of U Undergraduate Research Abstracts, Sp 2009, Vol 9., p.27, p. 120

D. Blanchard, P. M. Ligrani, B. Gale, I. Harvey, Micro-Structure Mechanical Failure Characterization Using Rotating Couette Flow in a Small Gap, J. Micromech. Microeng. 15 (2005) 792–801 doi:10.1088/0960-1317/15/4/017 pp 792-801

I.R. Harvey, M.R. Larsen, D.Turner, I. Doyle, J. Somers, J.Ortowski, “Evaluation of Solder-to-Passivation Attachment as a Wafer Bumping Architecture: I. Insulating Properties”, 2004 Workshop on Microelectronics and Electron Devices (WMED 2004), Boise ID

T. Ameel, B. Gale, I. Harvey, “A Three-semester Interdisciplinary Educational Program in Microsystems Engineering”, Proceedings of the 2004 American Society for Engineering Education Annual Conference & Exposition , SLC, 2004

I.R. Harvey, M.S. Miller, S. Blair, T. Ameel, B.K. Gale T. Ring, “Building Academic, Research, and Commercialization Programs in Micro and Nano Science and Engineering at the University of Utah”, 15th Biennial University/Government/Industry Microelectronics Symposium, IEEE/EDS, Boise, ID, 6/30-7/2/03

I.R. Harvey, M.R. Larsen, J. Somers, I. Doyle, “Correlation of CSP Bending Fatigue in a Cell Phone to a Unique Predictive Cyclic Bending Test”, Proc. IEEE/EDS workshop, Boise ID, 25 October, 2002

I.R. Harvey, J. Ortowski, D. Turner, C. Herbert, “Optimization Case Study of CSP Temperature Cycle and Board Bending Reliability”, APEX 2001, Jan. 16-18, San Diego, CA

I.R. Harvey, J. Ortowski, D. Turner, C. Herbert, “Strategy for Characterizing and Minimizing Effects of Tensile Stress in CSP’s as Induced by Board Flexure”, IMAPS 2000, Sept. 20-22, Boston, MA (won Outstanding Paper award for the Conference)

I.R. Harvey, J. Ortowski, D. Turner, C Herbert, “Effects of Thermal Shock- or Flex-Induced Tensile Stresses in CSP's”, Proc. 2000 Euro IEEE CPMT, Cork, Ireland, 8-9 May, 2000

I. R. Harvey, J.Ortowski, D.Turner, C.Herbert. “Reliability Considerations for the Transition to the Chip Size Package”, Proc. APEX '00, Long Beach, CA, March 14-16, 2000, P-AD2/4, pp. 4-1 to 4-9

S. Bothra, I. Harvey and M. Weling, "A Model and Methodology for Optimization of Spin On Dielectric Etchback Process," Proc. of VLSI Multilevel Interconnect Conference, Jun 1996.

W. Tsai, G. Mueller, R. Lindquist, L. Li, B. Frazier, V. Vahedi, I. Harvey, and C. Gabriel, "High Selectivity Plasma Etching of Silicon Dioxide with a 27/2 MHz Capacitive RF Discharge," 1996 Dry Process Symposium.

Milind Weling and Ian Harvey, "Optimization of a Deep Sub-Micron Via Etch and Strip Process Stopping on TiN," Electrochemical Society, 189th Mtg. Los Angeles, CA, May 1996.

Subhas Bothra, Ian Harvey and Milind Weling, "Process Control for Variable Pattern Density Effects During SOG Etchback," Proc. of Dielectrics for ULSI Multilevel Interconnect Conference, pp. 175-178, Feb. 1997.

S. Bothra, D. Pramanik, L.Q. Qian, I. Harvey, D. Baker, M. Weling, S. Sethi, C. Gabriel, S. Sengupta, H. Sur, & X.W. Lin, "Integration of 0.25 um Three and Five Level Interconnect System," Proc. of VLSI Multilevel Interconnect Conf., June 1997, pp. 43-48.

Randy Solis, Ian R. Harvey, and Calvin T. Gabriel, "Novel CF4+H2O Ashing Process for Reduction of Via Resistance," Proc. 6th Intl. Symp. on Semicond. Mfg., 1997.

I. R. Harvey. “New Paradigms Driving Customer Satisfaction and Optimum Resource Utilization in Failure Analysis”, Proc. ASMI/ISTFA '94, Los Angeles, CA, Nov. 15, 1994

I. R. Harvey. “Electrolytic Metal Migration: An Infant Mortality Mechanism in a High Pin Count HPPPGA Package”, Proc. ASMI/ISTFA '94, Los Angeles, CA, Nov. 15, 1994

I. R. Harvey. The Optimizing of Oxidation Parameters for Alleviating Dark Voltage Decay in Vacuum-Metallized Photoconductor Ground Planes, Doctoral Dissertation in Materials Science, CSM, Golden, Colorado, 1990.

I.R. Harvey, J. G. Byrne. "Effect of Hydrogen in Plastic Zones of Single-Edge Notch HSLA Samples," in Review of Progress in Quantitative Nondestructive Evaluation, Vol 8-B, Plenum, New York, 1989, pp. 1779-1786.

I. R. Harvey. Positron Doppler Studies of Hydrogen in Plane Stress Plastic Zones in an HSLA Steel, M.S. Metallurgy, U of U 1987.

Patents 28 US patents awarded comprise a mix of solo and cooperative efforts with colleagues, lab techs, equipment techs, superiors and subordinates.

Patent number	Issued Date	Inventors	Title
9,448,195	20 Sept., 2016	A.P. Moreno, G. Goldberg, A. Mondal, I.R. Harvey, B. Baker	Electrophysiological Recording System and Methods of Using Same
8,842,372 B2	23 Sept., 2014	Fisher, Charles; Harvey, Ian R.; Brian W. Baker	Lens Actuator
8,421,305	16 April, 2013	Harvey, Ian R.; Meacham, Taylor M.; Boutte, Ronald W.; Baker, Brian W.; Harvey, Iain E.	MEMS Devices And Systems Actuated By An Energy Field
WO/2008/121845	9 Oct 08	Boutte, Ronald W.; Solzbacher, Florian; Harvey, Ian R.; Horn, Justin A.; Meacham, Taylor M.; Gaskin, Nathaniel C. Baker, Brian W.	Micro-Deployable Devices And Systems
WO/2008/092132	7/31/08	Bamberg, Eberhard; Rakwal, Dinesh, R.; Jorgensen, Dean; Harvey, Ian, R. Free, Michael, L.; Balaji, Alagar, K.	Systems And Methods For Recycling Semiconductor Material Removed From A Raw Semiconductor Boule
D569,051	5/13/08	Harvey, Nephi & Ian (of Kaysville), Malcolm (Hyde Park), Chris Smith (N. Salt Lake)	RFID animal ear tag
6,309,948	10/30/01	Lin; Xi-Wei (Fremont, CA); Lee; Henry (San Francisco, CA); Harvey; Ian R. (Kaysville, UT)	Method for fabrication of a semiconductor device
6,249,039	6/19/01	Harvey; Ian Robert (Kaysville, UT); Ehman; Michael Frederick (North Ogden, UT); Harvey; Malcolm Randall (Hyde Park, UT); Stephenson; James Craig (Sandy, UT)	Integrated inductive components and method of fabricating such components
6,241,587	6/5/01	Drill; Charles Franklin (Boulder Creek, CA); Harvey; Ian Robert (Livermore, CA)	System for dislodging by-product agglomerations from a polishing pad of a chemical mechanical polishing machine
6,236,222	5/22/01	Sur, Jr.; Harlan (San Leandro, CA); Harvey; Ian R. (Kaysville, UT)	Method and apparatus for detecting misalignments in interconnect structures
6,215,129	4/10/01	Harvey; Ian Robert (Kaysville, UT); Sethi; Satyendra (Pleasanton, CA)	Via alignment, etch completion, and critical dimension measurement method and structure
6,207,543	3/27/01	Harvey; Ian Robert (Kaysville, UT); Lin; Xi-Wei (Fremont, CA)	Metallization technique for gate electrodes and local interconnects
6,197,621	3/6/01	Harvey; Ian R. (Kaysville, UT)	Custom laser conductor linkage for integrated circuits
6,174,803	1/16/01	Harvey; Ian R. (Kaysville, UT)	Integrated circuit device interconnection techniques
6,162,650	12/19/00	Harvey; Ian Robert (Kaysville, UT); Sethi; Satyendra (Pleasanton, CA)	Via alignment, etch completion, and critical dimension measurement method and structure
6,084,305	7/4/00	Harvey; Ian Robert (Livermore, CA)	Shaped etch-front for self-aligned contact
6,080,677	6/27/00	Gabriel; Calvin (Cupertino, CA); Harvey; Ian Robert (Livermore, CA); Leard; Linda (San Jose, CA)	Method for preventing micromasking in shallow trench isolation process etching
6,060,376	5/9/00	Gabriel; Calvin (Cupertino, CA); Lin; Xi-Wei (Fremont, CA); Zheng; Tammy (Fremont, CA); Leard; Linda (San Jose, CA); Harvey; Ian Robert (Livermore, CA)	Integrated etch process for polysilicon/metal gate
6,057,227	5/2/00	Harvey; Ian Robert (Livermore, CA)	Oxide etch stop techniques for uniform damascene trench depth
6,027,950	2/22/00	Harvey; Ian Robert (Livermore, CA); Gabriel; Calvin Todd (Cupertino, CA)	Method for achieving accurate SOG etchback selectivity
6,013,558	1/11/00	Harvey; Ian Robert (Livermore, CA); Gabriel; Calvin Todd (Cupertino, CA); Weling; Milind Ganesh (San Jose, CA)	Silicon-enriched shallow trench oxide for reduced recess during LDD spacer etch
6,008,130	12/28/99	Henderson; David E. (Fremont, CA); Harvey; Ian (Livermore, CA)	Polymer adhesive plasma confinement ring
5,976,987	11/2/99	Harvey; Ian Robert (Livermore, CA); Gabriel; Calvin Todd (Cupertino, CA); Bothra; Subhas (San Jose, CA)	In-situ corner rounding during oxide etch for improved plug fill
5,923,960	7/13/99	Harvey; Ian Robert (Livermore, CA)	Method of making a custom laser conductor linkage for the integrated circuits
5,895,245	4/20/99	Harvey; Ian Robert (Livermore, CA); Lin; Xi-Wei (Fremont, CA); Solis; Ramiro (Bandera, TX)	Plasma ash for silicon surface preparation
5,880,006	3/9/99	Lin; Xi-Wei (Fremont, CA); Lee; Henry (San Francisco, CA); Harvey; Ian R. (Kaysville, UT)	Method for fabrication of a semiconductor device
5,821,163	10/13/98	Harvey; Ian Robert (Livermore, CA); Gabriel; Calvin Todd (Cupertino, CA)	Method for achieving accurate SOG etchback selectivity
5,793,095	8/11/98	Harvey; Ian Robert (Livermore, CA)	Custom laser conductor linkage for integrated circuits